Home of APS
Atomic Layer Pitch Splitting
Enabling the semiconductor industry scale to the ångström (Å) era
AlixLabs APS
APS, short for ALE (Atomic Layer Etch) Pitch Splitting is at the core of AlixLabs' efforts to help the semiconductor industry scale to the ångström era in cost and energy efficient ways.
The APS process has been in development since 2019 and is already proven on 200 millimeter wafers of bulk silicon and wide bandgap materials.
News
AlixLabs’ APS™ Delivers 10 nm Precision & Cost Savings
Amaze Yourself with AlixLabs' Disruptive APS™ Technology: Achieving 10 nm Critical Dimensions with EaseAlixLabs 2024 World Tour
AlixLabs is happy to announce that our 300 mm APS™ Alpha Tool is now in its final testing phase.AlixLabs Qualifies APS™ for Use In 300-millimeter Silicon Wafer Designs and the Ångström (Å) era
Swedish semiconductor startup clears technical hurdle for leading-edge process use on 300 mm wafer design.
Who we are
AlixLabs' core team consists of PhD degree holders in fields such such as inorganic chemistry, physics and mathematics.
Rooted in academia
AlixLabs is based in the RISE Pronano laboratories in Sweden's Lund University.
About AlixLabs
AlixLabs is a Swedish semiconductor industry supplier with equipment and processes capable of manufacturing nanostructures with characteristic sizes smaller than 20 nanometers.
We enable energy efficient fabrication of structures beyond the resolution limits of optical and electron beam lithography – through APS