Home of APS

Atomic Layer Pitch Splitting



Enabling the semiconductor industry scale to the ångström (Å) era

AlixLabs APS

APS, short for ALE (Atomic Layer Etch) Pitch Splitting is at the core of AlixLabs' efforts to help the semiconductor industry scale to the ångström era in cost and energy efficient ways.

The APS process has been in development since 2019 and is already proven on 200 millimeter wafers of bulk silicon and wide bandgap materials.


News

Who we are

AlixLabs' core team consists of PhD degree holders in fields such such as inorganic chemistry, physics and mathematics.


Rooted in academia

AlixLabs is based in the RISE Pronano laboratories in Sweden's Lund University.


About AlixLabs

AlixLabs is a Swedish semiconductor industry supplier with equipment and processes capable of manufacturing nanostructures with characteristic sizes smaller than 20 nanometers.

We enable energy efficient fabrication of structures beyond the resolution limits of optical and electron beam lithography – through APS™.